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US08659742B2 Lithographic apparatus and a device manufacturing method 失效
光刻设备和器件制造方法

Lithographic apparatus and a device manufacturing method
Abstract:
An immersion lithographic apparatus is disclosed that has a fluid handling system configured to provide immersion liquid between a final element of a projection system and a surface which includes, in cross-section, a feature, and has an adjustment fluid source configured to locally change the composition of the immersion liquid to cause a local decrease in surface tension of the immersion liquid at least when a meniscus of the immersion liquid contacts the feature.
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