Invention Grant
- Patent Title: Lithographic apparatus and a device manufacturing method
- Patent Title (中): 光刻设备和器件制造方法
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Application No.: US12969635Application Date: 2010-12-16
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Publication No.: US08659742B2Publication Date: 2014-02-25
- Inventor: Niek Jacobus Johannes Roset , Nicolaas Ten Kate , Raymond Wilhelmus Louis Lafarre , Alexander Nikolov Zdravkov
- Applicant: Niek Jacobus Johannes Roset , Nicolaas Ten Kate , Raymond Wilhelmus Louis Lafarre , Alexander Nikolov Zdravkov
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/42

Abstract:
An immersion lithographic apparatus is disclosed that has a fluid handling system configured to provide immersion liquid between a final element of a projection system and a surface which includes, in cross-section, a feature, and has an adjustment fluid source configured to locally change the composition of the immersion liquid to cause a local decrease in surface tension of the immersion liquid at least when a meniscus of the immersion liquid contacts the feature.
Public/Granted literature
- US20110149257A1 LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD Public/Granted day:2011-06-23
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