Invention Grant
US08661635B2 Method of manufacturing a piezoelectronic device 有权
制造压电装置的方法

Method of manufacturing a piezoelectronic device
Abstract:
A piezoelectronic device and a method of fabricating the same are provided. The piezoelectronic device has a plurality of carbon nanotubes; at least one piezoceramic layer covering the plurality of carbon nanotubes; and a supporting material for supporting the carbon nanotubes and disposed between the carbon nanotubes, the supporting layer being coated with at least one piezoceramic layer, wherein the plurality of carbon nanotubes is arranged in a comb-shape.
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