Invention Grant
- Patent Title: Method for testing a microelectromechanical device, microelectromechanical device
- Patent Title (中): 用于测试微机电装置的方法,微机电装置
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Application No.: US12846507Application Date: 2010-07-29
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Publication No.: US08661871B2Publication Date: 2014-03-04
- Inventor: Giovanni Carlo Tripoli , Tommaso Ungaretti , Ernesto Lasalandra
- Applicant: Giovanni Carlo Tripoli , Tommaso Ungaretti , Ernesto Lasalandra
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2009A0594 20090731
- Main IPC: G12B13/00
- IPC: G12B13/00

Abstract:
Described herein is a method for testing a microelectromechanical device provided with a microstructure having a fixed structure and a movable mass, which is capacitively coupled to the fixed structure and mechanically connected thereto so as to be movable between a rest position and at least one position of maximum extension. The method envisages: applying a test voltage between the movable mass and the fixed structure so as to set up an electrostatic force between them and displace the movable mass into the position of maximum extension; keeping the movable mass in the position of maximum extension for a time interval; releasing the movable mass from the position of maximum extension; and detecting a current position of the movable mass.
Public/Granted literature
- US20110023605A1 METHOD FOR TESTING A MICROELECTROMECHANICAL DEVICE, AND MICROELECTROMECHANICAL DEVICE Public/Granted day:2011-02-03
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