Invention Grant
- Patent Title: Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection
- Patent Title (中): 具有改进的角速度检测灵敏度的单轴或双轴微机电陀螺仪
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Application No.: US13615353Application Date: 2012-09-13
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Publication No.: US08661897B2Publication Date: 2014-03-04
- Inventor: Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
- Applicant: Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group
- Priority: ITTO2008A0877 20081126
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
An integrated microelectromechanical structure is provided with: a driving mass, anchored to a substrate via elastic anchorage elements and moved in a plane with a driving movement; and a first sensing mass, suspended inside, and coupled to, the driving mass via elastic supporting elements so as to be fixed with respect to the driving mass in the driving movement and to perform a detection movement of rotation out of the plane in response to a first angular velocity; the elastic anchorage elements and the elastic supporting elements cause the detection movement to be decoupled from the driving movement. The elastic supporting elements are coupled to the first sensing mass at an end portion thereof, and the axis of rotation of the detection movement extends, within the first sensing mass, only through the end portion.
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