Invention Grant
US08661899B2 Microelectromechanical gyroscopes and related apparatus and methods 有权
微机电陀螺仪及相关设备及方法

Microelectromechanical gyroscopes and related apparatus and methods
Abstract:
An apparatus is described that includes a substrate having a first plate and a second plate. The first plate and the second plate collectively have a first mode when excited by a drive signal and have a second mode when excited by a gyroscopic effect. The first and second plates each include a temperature-compensated stack having first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, where the second layer is formed from a different material than the first and third layers.
Information query
Patent Agency Ranking
0/0