Invention Grant
- Patent Title: Microelectromechanical gyroscopes and related apparatus and methods
- Patent Title (中): 微机电陀螺仪及相关设备及方法
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Application No.: US13038000Application Date: 2011-03-01
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Publication No.: US08661899B2Publication Date: 2014-03-04
- Inventor: Guiti Zolfagharkhani , Jan H. Kuypers , Alexei Gaidarzhy , David M. Chen , Pritiraj Mohanty
- Applicant: Guiti Zolfagharkhani , Jan H. Kuypers , Alexei Gaidarzhy , David M. Chen , Pritiraj Mohanty
- Applicant Address: US MA Cambridge
- Assignee: Sand9, Inc.
- Current Assignee: Sand9, Inc.
- Current Assignee Address: US MA Cambridge
- Agency: Guntin & Gust, PLC
- Agent Andrew Gust
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
An apparatus is described that includes a substrate having a first plate and a second plate. The first plate and the second plate collectively have a first mode when excited by a drive signal and have a second mode when excited by a gyroscopic effect. The first and second plates each include a temperature-compensated stack having first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, where the second layer is formed from a different material than the first and third layers.
Public/Granted literature
- US20120024058A1 MICROELECTROMECHANICAL GYROSCOPES AND RELATED APPARATUS AND METHODS Public/Granted day:2012-02-02
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