Invention Grant
- Patent Title: Z-axis microelectromechanical device with improved stopper structure
- Patent Title (中): Z轴微机电装置具有改进的挡块结构
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Application No.: US12014563Application Date: 2008-01-15
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Publication No.: US08661900B2Publication Date: 2014-03-04
- Inventor: Angelo Antonio Merassi , Sarah Zerbini , Barbara Simoni
- Applicant: Angelo Antonio Merassi , Sarah Zerbini , Barbara Simoni
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2007A0033 20070119
- Main IPC: G01P15/08
- IPC: G01P15/08

Abstract:
In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.
Public/Granted literature
- US20080173959A1 Z-AXIS MICROELECTROMECHANICAL DEVICE WITH IMPROVED STOPPER STRUCTURE Public/Granted day:2008-07-24
Information query
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