Invention Grant
US08662941B2 Wire holder and terminal connector for hot wire chemical vapor deposition chamber
有权
用于热线化学气相沉积室的线架和端子连接器
- Patent Title: Wire holder and terminal connector for hot wire chemical vapor deposition chamber
- Patent Title (中): 用于热线化学气相沉积室的线架和端子连接器
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Application No.: US13454317Application Date: 2012-04-24
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Publication No.: US08662941B2Publication Date: 2014-03-04
- Inventor: Pravin Narwankar , Victor Pushparaj , Dieter Haas
- Applicant: Pravin Narwankar , Victor Pushparaj , Dieter Haas
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: H01R4/16
- IPC: H01R4/16

Abstract:
Apparatus for supporting the wires in a hot wire chemical vapor deposition (HWCVD) system are provided herein. In some embodiments, a terminal connector for a hot wire chemical vapor deposition (HWCVD) system may include a base; a wire clamp moveably disposed with relation to the base along an axis; a reflector shield extending from the wire clamp in a first direction along the axis; and a tensioner coupled to the base and wire clamp to bias the wire clamp in a second direction opposite the first direction.
Public/Granted literature
- US20120289078A1 WIRE HOLDER AND TERMINAL CONNECTOR FOR HOT WIRE CHEMICAL VAPOR DEPOSITION CHAMBER Public/Granted day:2012-11-15
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