Invention Grant
US08662956B2 Conditioner of chemical mechanical polishing apparatus 有权
化学机械抛光装置的护发素

Conditioner of chemical mechanical polishing apparatus
Abstract:
Provided are a conditioner of a chemical mechanical polishing apparatus for polishing a substrate over a platen pad that rotates and a method thereof. The conditioner includes a disk holder, a piston rod, a housing, and a load sensor. The disk holder secures a conditioning disk that finely cuts a surface of the platen pad. The piston rod delivers a normal force to the disk holder. The housing covers at least a portion of the piston rod. The load sensor is installed to receive the normal force that the piston rod delivers to the piston rod and measuring the normal force.
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