Invention Grant
- Patent Title: Conditioner of chemical mechanical polishing apparatus
- Patent Title (中): 化学机械抛光装置的护发素
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Application No.: US13099401Application Date: 2011-05-03
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Publication No.: US08662956B2Publication Date: 2014-03-04
- Inventor: Keon Sik Seo , Jae Phil Boo , Dong Soo Kim , Ja Cheul Goo , Chan Woon Jeon , Jnn Ho Ban
- Applicant: Keon Sik Seo , Jae Phil Boo , Dong Soo Kim , Ja Cheul Goo , Chan Woon Jeon , Jnn Ho Ban
- Applicant Address: KR Gyeonggi-do KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.,K.C. Tech Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.,K.C. Tech Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do KR Gyeonggi-do
- Agency: Kusner & Jaffe
- Priority: KR10-2010-0043466 20100510
- Main IPC: B24B53/00
- IPC: B24B53/00 ; B24B1/00

Abstract:
Provided are a conditioner of a chemical mechanical polishing apparatus for polishing a substrate over a platen pad that rotates and a method thereof. The conditioner includes a disk holder, a piston rod, a housing, and a load sensor. The disk holder secures a conditioning disk that finely cuts a surface of the platen pad. The piston rod delivers a normal force to the disk holder. The housing covers at least a portion of the piston rod. The load sensor is installed to receive the normal force that the piston rod delivers to the piston rod and measuring the normal force.
Public/Granted literature
- US20110275289A1 CONDITIONER OF CHEMICAL MECHANICAL POLISHING APPARATUS Public/Granted day:2011-11-10
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