Invention Grant
US08663424B2 Plasma processing apparatus and gas supply member support device
有权
等离子体处理装置和气体供应构件支撑装置
- Patent Title: Plasma processing apparatus and gas supply member support device
- Patent Title (中): 等离子体处理装置和气体供应构件支撑装置
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Application No.: US13115289Application Date: 2011-05-25
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Publication No.: US08663424B2Publication Date: 2014-03-04
- Inventor: Naoki Mihara , Kenji Sudou , Kazuo Murakami , Satoshi Furukawa
- Applicant: Naoki Mihara , Kenji Sudou , Kazuo Murakami , Satoshi Furukawa
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2010-120279 20100526
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306

Abstract:
There is provided a plasma processing apparatus capable of performing a plasma process while surely supplying a gas. The plasma processing apparatus includes an outer gas supply member having gas supply openings for supplying a plasma processing gas and a jacket configured to support the outer gas supply member within a processing chamber and serving as a gas supply member supporting device. The jacket includes three supporting members installed so as to connect the outer gas supply member and a sidewall and arranged at a certain distance in a direction in which the outer gas supply member extends and mounts fixed to the sidewall so as to mount the supporting members therein. The supporting members include a first supporting member fixed to a first mount and a second supporting member movably supported in a second mount.
Public/Granted literature
- US20110308733A1 PLASMA PROCESSING APPARATUS AND GAS SUPPLY MEMBER SUPPORT DEVICE Public/Granted day:2011-12-22
Information query
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