Invention Grant
- Patent Title: Magnetron sputtering apparatus and magnetron sputtering method
- Patent Title (中): 磁控溅射装置和磁控溅射法
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Application No.: US12867354Application Date: 2009-02-06
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Publication No.: US08663432B2Publication Date: 2014-03-04
- Inventor: Masaaki Iwasaki , Yoshifumi Oda , Takehiro Sato
- Applicant: Masaaki Iwasaki , Yoshifumi Oda , Takehiro Sato
- Applicant Address: JP Yokohama-Shi JP Tokyo
- Assignee: Shibaura Mechatronics Corporation,Sony DADC Corporation
- Current Assignee: Shibaura Mechatronics Corporation,Sony DADC Corporation
- Current Assignee Address: JP Yokohama-Shi JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2008-032127 20080213
- International Application: PCT/JP2009/052100 WO 20090206
- International Announcement: WO2009/101909 WO 20090820
- Main IPC: C23C14/35
- IPC: C23C14/35

Abstract:
A magnetron sputtering apparatus of the invention includes: a sputtering chamber in which a target can be opposed to an object to be subjected to film formation; a gas introduction port facing the sputtering chamber; a magnet provided outside the sputtering chamber and opposite to the target and being rotatable about a rotation center which is eccentric with respect to center of the magnet; a sensor configured to detect a circumferential position of the magnet in a plane of rotation of the magnet; and a controller configured to start voltage application to the target to cause electrical discharge in the sputtering chamber on the basis of the circumferential position of the rotating magnet and gas pressure distribution in the sputtering chamber.
Public/Granted literature
- US20110114473A1 MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD Public/Granted day:2011-05-19
Information query
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