Invention Grant
- Patent Title: Micro plasma jet generator
- Patent Title (中): 微型等离子喷射发生器
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Application No.: US10590969Application Date: 2004-07-22
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Publication No.: US08663572B2Publication Date: 2014-03-04
- Inventor: Takanori Ichiki
- Applicant: Takanori Ichiki
- Applicant Address: JP Kawaguchi-shi
- Assignee: Japan Science and Technology Agency
- Current Assignee: Japan Science and Technology Agency
- Current Assignee Address: JP Kawaguchi-shi
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2004-076940 20040317
- International Application: PCT/JP2004/010388 WO 20040722
- International Announcement: WO2005/091687 WO 20050929
- Main IPC: B01J19/08
- IPC: B01J19/08
Abstract:
The present invention provides a microplasma jet generator capable of stably generating a microplasma jet in a microspace at atmospheric pressure with low electric power.The microplasma jet generator is driven with a VHF power supply to generate an inductively coupled microplasma jet and includes a substrate, a micro-antenna disposed on the substrate, and a discharge tube located close to the micro-antenna. The micro-antenna has a flat meandering shape with plural turns.
Public/Granted literature
- US20080063576A1 Micro Plasma Jet Generator Public/Granted day:2008-03-13
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