Invention Grant
- Patent Title: Germanium complexes with amidine derivative ligand and process for preparing the same
- Patent Title (中): 锗配合物与脒衍生物配体及其制备方法
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Application No.: US13143621Application Date: 2010-01-07
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Publication No.: US08663736B2Publication Date: 2014-03-04
- Inventor: Jae Sun Jung , Su Hyong Yun , Minchan Kim , Sung Won Han , Yong Joo Park , Su Jung Shin , Ki Whan Sung , Sang Kyung Lee
- Applicant: Jae Sun Jung , Su Hyong Yun , Minchan Kim , Sung Won Han , Yong Joo Park , Su Jung Shin , Ki Whan Sung , Sang Kyung Lee
- Applicant Address: KR Chungcheongnam-do
- Assignee: Soulbrain Sigma-Aldrich Ltd.
- Current Assignee: Soulbrain Sigma-Aldrich Ltd.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: The Webb Law Firm
- Priority: KR10-2009-0001645 20090108
- International Application: PCT/KR2010/000105 WO 20100107
- International Announcement: WO2010/079979 WO 20100715
- Main IPC: C23C16/18
- IPC: C23C16/18 ; C07F7/30
Abstract:
Provided is a germanium complex represented by Chemical Formula 1 wherein Y1 and Y2 are independently selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (Ci-C7) alkyl. The provided germanium complex with an amidine derivative ligand is thermally stable, is highly volatile, and does not include halogen components. Therefore, it may be usefully used as a precursor to produce high-quality germanium thin film or germanium-containing compound thin film by metal organic chemical vapor deposition (MOCVD) or atomic layer deposition (ALD).
Public/Granted literature
- US20110268881A1 Novel Germanium Complexes with Amidine Derivative Ligand and Process for Preparing the Same Public/Granted day:2011-11-03
Information query
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