Invention Grant
US08663898B2 Resist underlayer film composition and patterning process using the same
有权
抗蚀剂下层膜组合物和使用其的图案化工艺
- Patent Title: Resist underlayer film composition and patterning process using the same
- Patent Title (中): 抗蚀剂下层膜组合物和使用其的图案化工艺
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Application No.: US13311137Application Date: 2011-12-05
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Publication No.: US08663898B2Publication Date: 2014-03-04
- Inventor: Tsutomu Ogihara , Takeru Watanabe , Yusuke Biyajima , Daisuke Kori , Takeshi Kinsho , Toshihiko Fujii
- Applicant: Tsutomu Ogihara , Takeru Watanabe , Yusuke Biyajima , Daisuke Kori , Takeshi Kinsho , Toshihiko Fujii
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2011-000583 20110105
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/11 ; G03F7/26 ; G03F7/40

Abstract:
There is disclosed A resist underlayer film composition, wherein the composition contains a polymer obtained by condensation of, at least, one or more compounds represented by the following general formulae (1-1) and/or (1-2), one or more kinds of a compound represented by the following general formula (2), and one or more kinds of a compound, represented by the following general formula (3), and/or an equivalent body thereof. There can be provided an underlayer film composition, especially for a trilayer resist process, that can form an underlayer film having reduced reflectance, (namely, an underlayer film having optimum n-value and k-value as an antireflective film), excellent filling-up properties, high pattern-antibending properties, and not causing line fall or wiggling after etching especially in a high aspect line that is thinner than 60 nm, and a patterning process using the same.
Public/Granted literature
- US20120171868A1 RESIST UNDERLAYER FILM COMPOSITION AND PATTERNING PROCESS USING THE SAME Public/Granted day:2012-07-05
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