Invention Grant
- Patent Title: Top coating composition
- Patent Title (中): 顶涂层组成
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Application No.: US13264285Application Date: 2010-04-20
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Publication No.: US08663903B2Publication Date: 2014-03-04
- Inventor: Kazuhiko Maeda , Takamasa Kitamoto , Haruhiko Komoriya , Satoru Narizuka , Yoshimi Isono , Kazunori Mori
- Applicant: Kazuhiko Maeda , Takamasa Kitamoto , Haruhiko Komoriya , Satoru Narizuka , Yoshimi Isono , Kazunori Mori
- Applicant Address: JP Ube-shi
- Assignee: Central Glass Company, Limited
- Current Assignee: Central Glass Company, Limited
- Current Assignee Address: JP Ube-shi
- Agency: Crowell & Moring LLP
- Priority: JP2009-103451 20090421
- International Application: PCT/JP2010/057007 WO 20100420
- International Announcement: WO2010/123000 WO 20101028
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C08F20/22

Abstract:
Disclosed is a top coating composition formed on a resist film, for protecting the resist film, the top coating composition being a top coating composition for photoresist, characterized by containing a fluorine-containing polymer having a repeating unit represented by the following general formula (1). This composition is capable of controlling developing solution solubility and has a high water repellency. [In the formula, R1 represents a hydrogen atom, fluorine atom, methyl group or trifluoromethyl group, R2 represents a heat-labile protecting group, R3 represents a fluorine atom or fluorine-containing alkyl group, and W is a bivalent linking group.]
Public/Granted literature
- US20120040294A1 Top Coating Composition Public/Granted day:2012-02-16
Information query
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