Invention Grant
- Patent Title: Method for analysis of contaminants in a process fluid stream
- Patent Title (中): 分析工艺流体流中污染物的方法
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Application No.: US10544309Application Date: 2004-02-20
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Publication No.: US08664004B2Publication Date: 2014-03-04
- Inventor: Jeffrey J. Spiegelman , Daniel Alvarez, Jr. , Allan Tram
- Applicant: Jeffrey J. Spiegelman , Daniel Alvarez, Jr. , Allan Tram
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- International Application: PCT/US2004/004845 WO 20040220
- International Announcement: WO2004/077015 WO 20040910
- Main IPC: G01N1/40
- IPC: G01N1/40
Abstract:
The present invention relates to the monitoring of contaminant concentrations in manufacturing processes that employ fluid purification devices. The invention provides a sensitive method for analyzing contaminant concentrations in a process fluid stream using purification material to adsorb contaminants contained therein over an entire process.
Public/Granted literature
- US20060211131A1 Method for analysis of contaminants in a process fluid stream Public/Granted day:2006-09-21
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