A method of fabricating an integrated circuit and an integrated circuit having silicon on a stress liner are disclosed. In one embodiment, the method comprises providing a semiconductor substrate comprising an embedded disposable layer, and removing at least a portion of the disposable layer to form a void within the substrate. This method further comprises depositing a material in that void to form a stress liner, and forming a transistor on an outside semiconductor layer of the substrate. This semiconductor layer separates the transistor from the stress liner. In one embodiment, the substrate includes isolation regions; and the removing includes forming recesses in the isolation regions, and removing at least a portion of the disposable layer via these recesses. In one embodiment, the depositing includes depositing a material in the void via the recesses. End caps may be formed in the recesses at ends of the stress liner.