Invention Grant
US08664063B2 Method of producing a semiconductor device and semiconductor device
有权
半导体器件和半导体器件的制造方法
- Patent Title: Method of producing a semiconductor device and semiconductor device
- Patent Title (中): 半导体器件和半导体器件的制造方法
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Application No.: US13690308Application Date: 2012-11-30
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Publication No.: US08664063B2Publication Date: 2014-03-04
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66

Abstract:
A method for producing a semiconductor device includes the steps of forming a planar silicon layer, first and second pillar-shaped silicon layers on a silicon substrate; forming a gate insulating film, depositing a metal film and a polysilicon around the gate insulating film, conducting planarization, conducting etching to expose upper portions of the first and second pillar-shaped silicon layers, forming first and second insulating film sidewalls, and forming first and second gate electrodes and a gate line; forming n-type diffusion layers in upper and lower portions of the first pillar-shaped silicon layer, and forming p-type diffusion layers in upper and lower portions of the second pillar-shaped silicon layer; forming a third insulating film sidewall on side walls of the first and second insulating film sidewalls, the first and second gate electrodes, and the gate line; and forming a silicide.
Public/Granted literature
- US20130146964A1 METHOD OF PRODUCING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE Public/Granted day:2013-06-13
Information query
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