Invention Grant
- Patent Title: Method for removing metallic nanotube
- Patent Title (中): 去除金属纳米管的方法
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Application No.: US13504043Application Date: 2011-11-21
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Publication No.: US08664091B2Publication Date: 2014-03-04
- Inventor: Huilong Zhu , Zhijiong Luo , Haizhou Yin
- Applicant: Huilong Zhu , Zhijiong Luo , Haizhou Yin
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Osha Liang LLP
- Priority: CN201110354410 20111110
- International Application: PCT/CN2011/082533 WO 20111121
- International Announcement: WO2013/067720 WO 20130516
- Main IPC: H01L21/479
- IPC: H01L21/479

Abstract:
A method for removing a metallic nanotube, which is formed on a substrate in a first direction, includes forming a plurality of conductors in a second direction crossing the first direction, electrically contacting the plurality of conductors with metallic nanotube, respectively, forming at least two voltage-applying electrodes on the conductors, each of which electrically contacting at least one of the conductors, and applying voltages to at least some of the conductors through the voltage-applying electrodes, respectively. Among the conductors to which the voltages are respectively applied, every two adjacent conductors have an electrical potential difference created therebetween, so as to burn out the metallic nanotube.
Public/Granted literature
- US20130122690A1 METHOD FOR REMOVING METALLIC NANOTUBE Public/Granted day:2013-05-16
Information query
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