Invention Grant
- Patent Title: Image sensor and method for fabricating the same
- Patent Title (中): 图像传感器及其制造方法
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Application No.: US13742714Application Date: 2013-01-16
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Publication No.: US08664114B2Publication Date: 2014-03-04
- Inventor: Ki-Jun Yun
- Applicant: Dongbu HiTek Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Jiang, PLLC
- Priority: KR10-2012-0052101 20120516
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
A method for fabricating an image sensor includes at least one of: (1) Forming a gate on a semiconductor substrate; (2) Forming spacers on both side walls of the gate and forming a dummy pattern on an upper portion of the semiconductor substrate; and (3) Forming a metal pad for an electrical connection on an upper portion of the dummy pattern. The method may include at least one of: (1) Forming an interlayer dielectric layer covering the entire semiconductor substrate, (2) Etching portions of the interlayer dielectric layer and the semiconductor substrate to form a super-contact hole; and (3) forming an insulation film on the entire surface of the interlayer dielectric layer. The method may include forming normal contact holes such that a portion of an upper portion of the gate and a partial region of the metal pad for an electrical connection are exposed and filling up the normal contact holes with a conductive material to form normal contacts.
Public/Granted literature
- US20130307035A1 IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-11-21
Information query
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