Invention Grant
- Patent Title: Infrared absorber and thermal infrared detector
- Patent Title (中): 红外线吸收器和热红外探测器
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Application No.: US12161868Application Date: 2007-01-24
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Publication No.: US08664510B2Publication Date: 2014-03-04
- Inventor: Fumikazu Ojima , Jun Suzuki , Ryusuke Kitaura
- Applicant: Fumikazu Ojima , Jun Suzuki , Ryusuke Kitaura
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: Hamamatsu Photonics K.K.
- Current Assignee: Hamamatsu Photonics K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JPP2006-016733 20060125
- International Application: PCT/JP2007/051085 WO 20070124
- International Announcement: WO2007/086424 WO 20070802
- Main IPC: H01L35/32
- IPC: H01L35/32

Abstract:
The infrared ray absorbing film 2 is provided with a first layer 21 containing TiN and a second layer 22 containing an Si based compound, converting energy of infrared ray made incident from the second layer 22 to heat. TiN is high in absorption rate of infrared ray over a wavelength range shorter than 8 μm, while high in reflection rate of infrared ray over a wavelength range longer than 8 μm. Therefore, if an Si based compound layer excellent in absorption rate of infrared ray over a longer wavelength range is laminated on a TiN layer, infrared ray over a wavelength range lower in absorption rate on the TiN layer can be favorably absorbed on the Si based compound layer, and also infrared ray in an attempt to transmit the Si based compound layer can be reflected on a boundary surface of the TiN layer and returned to the Si based compound layer.
Public/Granted literature
- US20090301542A1 INFRARED ABSORBER AND THERMAL INFRARED DETECTOR Public/Granted day:2009-12-10
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