Invention Grant
US08664621B2 Device for generating an ion beam with magnetic filter 有权
用磁性过滤器生成离子束的装置

Device for generating an ion beam with magnetic filter
Abstract:
This device (2) for generating an ion beam (4) including a liquid metal ion source (18) is characterized in that the ion source is surrounded by a cryogenic trap (28) maintained at a low temperature, this cryogenic trap being able to trap volatile chemical species (G) by condensing them before they can reach the ion source.
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