Invention Grant
- Patent Title: Non-volatile memory and fabricating method thereof
- Patent Title (中): 非易失性存储器及其制造方法
-
Application No.: US12839559Application Date: 2010-07-20
-
Publication No.: US08664709B2Publication Date: 2014-03-04
- Inventor: Shih-Guei Yan , Wen-Jer Tsai , Jyun-Siang Huang
- Applicant: Shih-Guei Yan , Wen-Jer Tsai , Jyun-Siang Huang
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
A non-volatile memory including a substrate, a stacked gate structure, two doped regions and a plurality of spacers is provided. The stacked gate structure is disposed on the substrate, wherein the stacked gate structure includes a first dielectric layer, a charge storage layer, a second dielectric layer and a conductive layer in sequence from bottom to top relative to the substrate. The doped regions are disposed in the substrate at two sides of the stacked gate structure, respectively, and bottom portions of the doped regions contact with the substrate under the doped regions. The spacers are respectively disposed between each side of each of the doped regions and the substrate, and top portions of the spacers are lower than top portions of the doped regions.
Public/Granted literature
- US20120018790A1 NON-VOLATILE MEMORY AND FABRICATING METHOD THEREOF Public/Granted day:2012-01-26
Information query
IPC分类: