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US08664733B2 MEMS microphone and method for manufacture 有权
MEMS麦克风和制造方法

  • Patent Title: MEMS microphone and method for manufacture
  • Patent Title (中): MEMS麦克风和制造方法
  • Application No.: US13579433
    Application Date: 2011-02-11
  • Publication No.: US08664733B2
    Publication Date: 2014-03-04
  • Inventor: Pirmin Hermann Otto Rombach
  • Applicant: Pirmin Hermann Otto Rombach
  • Applicant Address: DE Munich
  • Assignee: Epcos AG
  • Current Assignee: Epcos AG
  • Current Assignee Address: DE Munich
  • Agency: Nixon Peabody LLP
  • Priority: DE102010008044 20100216
  • International Application: PCT/EP2011/052019 WO 20110211
  • International Announcement: WO2011/101291 WO 20110825
  • Main IPC: H01L29/84
  • IPC: H01L29/84
MEMS microphone and method for manufacture
Abstract:
An improved method for manufacturing an MEMS microphone with a double fixed electrode is specified which results in a microphone which likewise has improved properties.
Abstract(Chinese):

规定了用于制造具有双固定电极的MEMS麦克风的改进方法，其产生同样具有改进性能的麦克风。

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