Invention Grant
- Patent Title: Testing apparatus for piezoelectric/electrostrictive device
- Patent Title (中): 压电/电致伸缩装置测试装置
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Application No.: US13645797Application Date: 2012-10-05
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Publication No.: US08664828B2Publication Date: 2014-03-04
- Inventor: Naoki Goto , Takao Ohnishi
- Applicant: Naoki Goto , Takao Ohnishi
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Priority: JP2008-109567 20080418; JP2008-330491 20081225
- Main IPC: G01R29/22
- IPC: G01R29/22 ; G01H11/00

Abstract:
There is provided a method for testing a piezoelectric/electrostrictive actuator, wherein the displacement of a piezoelectric/electrostrictive actuator is estimated on the basis of the relations between one or more frequency characteristic values selected from the group consisting of the heights and areas of the peaks of the resonance waveforms and the difference of the maximum and minimum of the first order or first to higher orders of the resonance frequency characteristic values of the piezoelectric/electrostrictive actuator and the k-th order (k=1 to 4) of the first or first to higher orders of resonance frequencies. According to this piezoelectric/electrostrictive actuator testing method, a piezoelectric/electrostrictive actuator can be tested with high precision without actually driving the same as a product and without being accompanied by any disassembly/breakage.
Public/Granted literature
- US20130033266A1 TESTING APPARATUS FOR PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE Public/Granted day:2013-02-07
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