An ADC is disclosed which has, as a first stage, a successive approximation converter, or other compensated, direct comparison converter, followed by a sigma delta modulation converter as a second stage. The sigma delta converter may beneficially be a first order modulator. The resulting ADC combines accuracy with low power consumption per conversion, and thus is particularly suited for use in temperature sensors for applications such as RFID transponders. Such a temperature sensor and an RFID transponder are also disclosed. There is also disclosed a method of analog-to-digital conversion, comprising a first successive approximation register or other compensated, direct comparison conversion stage followed by a sigma delta modulation stage, which, further, may be combined with providing a proportional-to-absolute-temperature (PTAT) signal, for low-power, accurate temperature sensing.