Invention Grant
US08667665B2 Method of manufacturing a microelectromechanical system (MEMS) resonator
有权
制造微机电系统（MEMS）谐振器的方法
- Patent Title: Method of manufacturing a microelectromechanical system (MEMS) resonator
- Patent Title (中): 制造微机电系统（MEMS）谐振器的方法
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Application No.: US13562684Application Date: 2012-07-31
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Publication No.: US08667665B2Publication Date: 2014-03-11
- Inventor: Paul Merritt Hagelin , Charles Grosjean
- Applicant: Paul Merritt Hagelin , Charles Grosjean
- Applicant Address: US CA Sunnyvale
- Assignee: SiTime Corporation
- Current Assignee: SiTime Corporation
- Current Assignee Address: US CA Sunnyvale
- Agent Neil A. Steinberg
- Main IPC: H04R31/00
- IPC: H04R31/00
Abstract:
One embodiment of the present inventions sets forth a method for decreasing a temperature coefficient of frequency (TCF) of a MEMS resonator. The method comprises lithographically defining slots in the MEMS resonator beams and filling the slots with a compensating material (for example, an oxide) wherein the temperature coefficient of Young's Modulus (TCE) of the compensating material has a sign opposite to a TCE of the material of the resonating element.
Public/Granted literature
- US20120295384A1 Temperature Stable MEMS Resonator Public/Granted day:2012-11-22
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