Invention Grant
- Patent Title: Air knife chamber including blocking member
- Patent Title (中): 气刀室包括阻塞构件
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Application No.: US13735625Application Date: 2013-01-07
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Publication No.: US08667704B2Publication Date: 2014-03-11
- Inventor: Su-Chan Park , Ye-Hoon Im , Kyoung-Hoon Min
- Applicant: LG Chem, Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Chem, Ltd.
- Current Assignee: LG Chem, Ltd.
- Current Assignee Address: KR Seoul
- Agency: McKenna Long & Aldridge, LLP
- Priority: KR10-2010-0067948 20100714; KR10-2011-0069965 20110714
- Main IPC: F26B9/00
- IPC: F26B9/00
Abstract:
Disclosed is an air knife chamber constructed such that water flowing down along a partition wall is allowed to fall in front of a slit. Due to this construction, the water can be effectively removed by air knives, thus contributing to a reduction in the defective proportion of substrates.
Public/Granted literature
- US20130180079A1 AIR KNIFE CHAMBER INCLUDING BLOCKING MEMBER Public/Granted day:2013-07-18
Information query
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