Invention Grant
US08667839B2 Heat conduction-type sensor for calibrating effects of temperature and type of fluid, and thermal flow sensor and thermal barometric sensor using this sensor
有权
用于校准温度和流体类型影响的热传导型传感器,以及使用该传感器的热流量传感器和热气压传感器
- Patent Title: Heat conduction-type sensor for calibrating effects of temperature and type of fluid, and thermal flow sensor and thermal barometric sensor using this sensor
- Patent Title (中): 用于校准温度和流体类型影响的热传导型传感器,以及使用该传感器的热流量传感器和热气压传感器
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Application No.: US13389565Application Date: 2012-01-13
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Publication No.: US08667839B2Publication Date: 2014-03-11
- Inventor: Mitsuteru Kimura
- Applicant: Mitsuteru Kimura
- Applicant Address: JP Miyagi
- Assignee: Tohoku Gakuin
- Current Assignee: Tohoku Gakuin
- Current Assignee Address: JP Miyagi
- Agency: Young & Thompson
- Priority: JP2011-032745 20110218
- International Application: PCT/JP2012/050593 WO 20120113
- International Announcement: WO2012/111368 WO 20120823
- Main IPC: G01F1/68
- IPC: G01F1/68

Abstract:
A heat conduction-type sensor corrects (calibrate) effects of a temperature of a measurement target fluid and a type of the fluid on a measurement value in measurement of a flow velocity, a mass flow, or an atmospheric pressure. Also provided is a thermal flow sensor and a thermal barometric sensor with this correcting function, high sensitivity, simple configuration, and low cost. At least two thin films that are thermally separated from a substrate through the same cavity are provided, one thin film comprises a heater and a temperature sensor, and the other thin film comprises at least one temperature sensor, the temperature sensors being thin-film thermocouples. The thin film is arranged in proximity so that it is heated only through the measurement target fluid by heating of the heater. A calibration circuit calculates and compares quantities concerning heat transfer coefficients of a standard fluid and the unknown measurement target fluid.
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