Invention Grant
US08668436B2 Turbomolecular pump 有权
涡轮分子泵

  • Patent Title: Turbomolecular pump
  • Patent Title (中): 涡轮分子泵
  • Application No.: US12867232
    Application Date: 2008-02-15
  • Publication No.: US08668436B2
    Publication Date: 2014-03-11
  • Inventor: Kouta Oishi
  • Applicant: Kouta Oishi
  • Applicant Address: JP Kyoto-Shi
  • Assignee: Shimadzu Corporation
  • Current Assignee: Shimadzu Corporation
  • Current Assignee Address: JP Kyoto-Shi
  • Agency: Bingham McCutchen LLP
  • International Application: PCT/JP2008/052540 WO 20080215
  • International Announcement: WO2009/101699 WO 20090820
  • Main IPC: F04D25/16
  • IPC: F04D25/16
Turbomolecular pump
Abstract:
A turbomolecular pump has multiple stages of alternately arranged rotors and stators. Each of the rotors has blades radially extending from a rotating body. Each of the stators has blades radially extending toward the rotating shaft of the rotating body. The blades provided on at least either of a rotor and a stator are formed in a twisted shape having a blade angle set by an expression in which the radial distance from the rotating shaft is a variable. The expression of the blade angle is composed of a first expression which provides the optimum angle of each blade on the outer side of a predetermined radius of the blade and also composed of a second expression which provides the blade angle suppressing, on the inner side of the predetermined radius, reverse flow of gas molecules.
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