Invention Grant
- Patent Title: Turbomolecular pump
- Patent Title (中): 涡轮分子泵
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Application No.: US12867232Application Date: 2008-02-15
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Publication No.: US08668436B2Publication Date: 2014-03-11
- Inventor: Kouta Oishi
- Applicant: Kouta Oishi
- Applicant Address: JP Kyoto-Shi
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto-Shi
- Agency: Bingham McCutchen LLP
- International Application: PCT/JP2008/052540 WO 20080215
- International Announcement: WO2009/101699 WO 20090820
- Main IPC: F04D25/16
- IPC: F04D25/16

Abstract:
A turbomolecular pump has multiple stages of alternately arranged rotors and stators. Each of the rotors has blades radially extending from a rotating body. Each of the stators has blades radially extending toward the rotating shaft of the rotating body. The blades provided on at least either of a rotor and a stator are formed in a twisted shape having a blade angle set by an expression in which the radial distance from the rotating shaft is a variable. The expression of the blade angle is composed of a first expression which provides the optimum angle of each blade on the outer side of a predetermined radius of the blade and also composed of a second expression which provides the blade angle suppressing, on the inner side of the predetermined radius, reverse flow of gas molecules.
Public/Granted literature
- US20110064562A1 Turbomolecular Pump Public/Granted day:2011-03-17
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