Invention Grant
- Patent Title: Method of removing liquid from a barrier structure
- Patent Title (中): 从屏障结构中去除液体的方法
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Application No.: US13647910Application Date: 2012-10-09
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Publication No.: US08668778B2Publication Date: 2014-03-11
- Inventor: Jimmy D. Collins , David P. DeKraker , Tracy A. Gast , Alan D. Rose
- Applicant: FSI International, Inc.
- Applicant Address: US MN Chaska
- Assignee: TEL FSI, INc.
- Current Assignee: TEL FSI, INc.
- Current Assignee Address: US MN Chaska
- Agency: Kagan Binder, PLLC
- Main IPC: B08B5/04
- IPC: B08B5/04 ; B08B3/02
Abstract:
The present invention provides methods of removing liquid from a barrier structure in the context of treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.
Public/Granted literature
- US20130032172A1 METHOD OF REMOVING LIQUID FROM A BARRIER STRUCTURE Public/Granted day:2013-02-07
Information query
IPC分类:
