Invention Grant
- Patent Title: Microwave plasma reactors
- Patent Title (中): 微波等离子体反应器
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Application No.: US13657353Application Date: 2012-10-22
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Publication No.: US08668962B2Publication Date: 2014-03-11
- Inventor: Jes Asmussen , Timothy Grotjohn , Donnie K. Reinhard , Thomas Schuelke , M. Kagan Yaran , Kadek W. Hemawan , Michael Becker , David King , Yajun Gu , Jing Lu
- Applicant: Board of Trustees of Michigan State University , Fraunhofer USA
- Applicant Address: US MI East Lansing US MI Plymouth
- Assignee: Board of Trustees of Michigan State University,Fraunhofer USA
- Current Assignee: Board of Trustees of Michigan State University,Fraunhofer USA
- Current Assignee Address: US MI East Lansing US MI Plymouth
- Agency: Marshall, Gerstein & Borun LLP
- Main IPC: C23C16/511
- IPC: C23C16/511 ; C23C16/27

Abstract:
New and improved microwave plasma assisted reactors, for example chemical vapor deposition (MPCVD) reactors, are disclosed. The disclosed microwave plasma assisted reactors operate at pressures ranging from about 10 Torr to about 760 Torr. The disclosed microwave plasma assisted reactors include a movable lower sliding short and/or a reduced diameter conductive stage in a coaxial cavity of a plasma chamber. For a particular application, the lower sliding short position and/or the conductive stage diameter can be variably selected such that, relative to conventional reactors, the reactors can be tuned to operate over larger substrate areas, operate at higher pressures, and discharge absorbed power densities with increased diamond synthesis rates (carats per hour) and increased deposition uniformity.
Public/Granted literature
- US20130101730A1 MICROWAVE PLASMA REACTORS Public/Granted day:2013-04-25
Information query
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