Invention Grant
US08669024B2 Method of fabricating color filter substrate and infrared heating apparatus for the same 有权
彩色滤光片基板和红外线加热装置的制造方法

Method of fabricating color filter substrate and infrared heating apparatus for the same
Abstract:
A method of fabricating a color filter substrate and an infrared heating apparatus for the same are provided. A post-baking process is replaced with an infrared irradiation method with a rapid thermal transfer characteristic. Therefore, the yield and production efficiency can be improved. The method of fabricating a color filter substrate includes coating a color resist layer on an entire surface of a substrate, placing a mask on the substrate and exposing the substrate, developing the exposed color resist layer to form a color filter pattern, and curing the color filter pattern by irradiating the substrate with infrared rays.
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