Invention Grant
US08669488B2 Spatially chirped pulses for femtosecond laser ablation through transparent materials
有权
用于飞秒激光烧蚀的空间啁啾脉冲通过透明材料
- Patent Title: Spatially chirped pulses for femtosecond laser ablation through transparent materials
- Patent Title (中): 用于飞秒激光烧蚀的空间啁啾脉冲通过透明材料
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Application No.: US13065778Application Date: 2011-03-30
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Publication No.: US08669488B2Publication Date: 2014-03-11
- Inventor: Jeffrey Squier , Dawn Vitek , Charles Durfee , Daniel Adams , David Kleinfeld
- Applicant: Jeffrey Squier , Dawn Vitek , Charles Durfee , Daniel Adams , David Kleinfeld
- Applicant Address: US CO Golden
- Assignee: Colorado School of Mines
- Current Assignee: Colorado School of Mines
- Current Assignee Address: US CO Golden
- Agency: Sheridan Ross P.C.
- Main IPC: G02B26/00
- IPC: G02B26/00 ; B23K26/06 ; B23K26/36
Abstract:
Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (˜1 mm) features with parallel sidewalls are ablated at high material removal rates.
Public/Granted literature
- US20110297651A1 Spatially chirped pulses for femtosecond laser ablation through transparent materials Public/Granted day:2011-12-08
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