Invention Grant
- Patent Title: E-mode HFET device
- Patent Title (中): E型HFET器件
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Application No.: US13337753Application Date: 2011-12-27
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Publication No.: US08669591B2Publication Date: 2014-03-11
- Inventor: Fabio Alessio Marino , Paolo Menegoli
- Applicant: Fabio Alessio Marino , Paolo Menegoli
- Applicant Address: US CA San Jose
- Assignee: Eta Semiconductor Inc.
- Current Assignee: Eta Semiconductor Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
The present invention describes a transistor based on a Hetero junction FET structure, where the metal gate has been replaced by a stack formed by a highly doped compound semiconductor and an insulating layer in order to achieve enhancement mode operation and at the same time drastically reduce the gate current leakage. The combination of the insulating layer with a highly doped semiconductor allows the tuning of the threshold voltage of the device at the desired value by simply changing the composition of the semiconductor layer forming the gate region and/or its doping allowing a higher degree of freedom. In one of the embodiment, a back-barrier layer and a heavily doped threshold tuning layer are used to suppress Short Channel Effect phenomena and to adjust the threshold voltage of the device at the desired value. The present invention can be realized both with polar and non-polar (or semi-polar) materials.
Public/Granted literature
- US20130161698A1 E-MODE HFET DEVICE Public/Granted day:2013-06-27
Information query
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