Invention Grant
US08669608B2 Method for manufacturing nonvolatile semiconductor storage device and nonvolatile semiconductor storage device
有权
用于制造非易失性半导体存储装置和非易失性半导体存储装置的方法
- Patent Title: Method for manufacturing nonvolatile semiconductor storage device and nonvolatile semiconductor storage device
- Patent Title (中): 用于制造非易失性半导体存储装置和非易失性半导体存储装置的方法
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Application No.: US13419984Application Date: 2012-03-14
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Publication No.: US08669608B2Publication Date: 2014-03-11
- Inventor: Mitsuru Sato , Megumi Ishiduki , Masaru Kidoh , Atsushi Konno , Yoshihiro Akutsu , Masaru Kito , Yoshiaki Fukuzumi , Ryota Katsumata
- Applicant: Mitsuru Sato , Megumi Ishiduki , Masaru Kidoh , Atsushi Konno , Yoshihiro Akutsu , Masaru Kito , Yoshiaki Fukuzumi , Ryota Katsumata
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-206893 20110922
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
According to one embodiment, a method for manufacturing a nonvolatile semiconductor storage device includes; forming a first and a second stacked bodies; forming a through hole penetrating through the first stacked body, a second portion communicating with the first portion and penetrating through a select gate, and a third portion communicating with the second portion and penetrating through a second insulating layer; forming a memory film, a gate insulating film, and a channel body; forming a third insulating layer inside the channel body; forming a first embedded portion above a boundary portion inside the third portion; exposing the channel body by removing part of the first embedded portion and part of the third insulating layer in the third portion; and embedding a second embedded portion including silicon having higher impurity concentration than the first embedded portion above the first embedded portion inside the third portion.
Public/Granted literature
Information query
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