Invention Grant
- Patent Title: Maskless exposure apparatus and control method thereof
- Patent Title (中): 无掩模曝光装置及其控制方法
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Application No.: US12926513Application Date: 2010-11-23
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Publication No.: US08670107B2Publication Date: 2014-03-11
- Inventor: Jeong Hyoun Sung
- Applicant: Jeong Hyoun Sung
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce
- Priority: KR10-2009-0121240 20091208
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/68 ; G03B27/52 ; G03B27/32 ; G03B27/42

Abstract:
Disclosed herein is a mask-less exposure apparatus to enlarge or reduce an exposure area in a scan direction and a control method thereof. The mask-less exposure apparatus includes a light source unit configured to supply light, a spatial light modulation unit configured to selectively transmit the light to a substrate, a drive pulse generation unit configured to generate a drive pulse signal and adjust an operation beginning time of the spatial light modulation unit, a substrate shape measurement unit configured to measure a scan-direction length of the substrate, and a drive pulse correction unit configured to correct a drive pulse signal interval so as to enlarge or reduce an exposure area of the substrate according to the scan-direction length of the substrate.
Public/Granted literature
- US20110134406A1 Maskless exposure apparatus and control method thereof Public/Granted day:2011-06-09
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