Invention Grant
- Patent Title: Inspection apparatus
- Patent Title (中): 检验仪器
-
Application No.: US13295707Application Date: 2011-11-14
-
Publication No.: US08670117B2Publication Date: 2014-03-11
- Inventor: Jong-Kyu Hong , Monn-Young Jeon , Hong-Min Kim , Jung Hur , Sang-Kyu Yun
- Applicant: Jong-Kyu Hong , Monn-Young Jeon , Hong-Min Kim , Jung Hur , Sang-Kyu Yun
- Applicant Address: KR Seoul
- Assignee: Koh Young Technology Inc.
- Current Assignee: Koh Young Technology Inc.
- Current Assignee Address: KR Seoul
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2010-0112764 20101112
- Main IPC: G01N21/88
- IPC: G01N21/88

Abstract:
An inspection apparatus includes a work stage part, an optical module, and an optical module moving part. The work stage part receives a board. The work stage part includes work stages disposed in parallel. The optical module includes a projecting part disposed over the board, an image capturing part disposed at a side portion of the projecting part to receive the grating pattern light and capture a reflection image, and an optical path changing part changing a path of the grating pattern light and guiding the grating pattern light to the image capturing part so that the grating pattern light is downwardly incident into the image capturing part. The optical module moving part is disposed over and coupled to the optical module to move the optical module. Thus, time may be reduced and a space may be secured, required for inspecting a board.
Public/Granted literature
- US20120127463A1 INSPECTION APPARATUS Public/Granted day:2012-05-24
Information query