Invention Grant
- Patent Title: Interferometric encoder systems
- Patent Title (中): 干涉编码器系统
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Application No.: US13326117Application Date: 2011-12-14
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Publication No.: US08670127B2Publication Date: 2014-03-11
- Inventor: Leslie L. Deck , Peter J. de Groot , Michael Schroeder
- Applicant: Leslie L. Deck , Peter J. de Groot , Michael Schroeder
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
Public/Granted literature
- US20120170048A1 INTERFEROMETRIC ENCODER SYSTEMS Public/Granted day:2012-07-05
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