Invention Grant
- Patent Title: Micromechanical component
- Patent Title (中): 微机械部件
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Application No.: US12872596Application Date: 2010-08-31
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Publication No.: US08671757B2Publication Date: 2014-03-18
- Inventor: Jochen Reinmuth
- Applicant: Jochen Reinmuth
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009029095 20090902
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
A micromechanical component which has a substrate, a seismic mass, which is deflectably situated on the substrate, and a stop structure for limiting a deflection of the seismic mass in a direction away from the substrate. The stop structure is situated on the substrate and has a limiting section for limiting the deflection of the seismic mass, which is in a plane with the seismic mass. Furthermore, a method for manufacturing a micromechanical component is described.
Public/Granted literature
- US20110048131A1 MICROMECHANICAL COMPONENT Public/Granted day:2011-03-03
Information query
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