Invention Grant
- Patent Title: Pressure sensor having a diaphragm
- Patent Title (中): 具有隔膜的压力传感器
-
Application No.: US13085774Application Date: 2011-04-13
-
Publication No.: US08671765B2Publication Date: 2014-03-18
- Inventor: Tomohisa Tokuda , Hirofumi Tojo , Nozomi Kida
- Applicant: Tomohisa Tokuda , Hirofumi Tojo , Nozomi Kida
- Applicant Address: JP Tokyo
- Assignee: Azbil Corporation
- Current Assignee: Azbil Corporation
- Current Assignee Address: JP Tokyo
- Agency: Troutman Sanders LLP
- Priority: JP2010-092268 20100413
- Main IPC: G01L13/02
- IPC: G01L13/02 ; G01L15/00
Abstract:
A pressure sensor comprising: a sensor chip; a differential pressure diaphragm provided in the center portion of the sensor chip; a differential pressure gauge provided in the differential pressure diaphragm; a static pressure diaphragm provided at the outer peripheral portion of the differential pressure diaphragm; a first static pressure gauge formed at an edge portion of the static pressure diaphragm; and a second static pressure gauge formed at a center portion of the static pressure diaphragm.
Public/Granted literature
- US20110247421A1 PRESSURE SENSOR Public/Granted day:2011-10-13
Information query
