Invention Grant
- Patent Title: Methods for enhanced fluid delivery on bevel etch applications
- Patent Title (中): 斜面蚀刻应用中增强流体输送的方法
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Application No.: US13668741Application Date: 2012-11-05
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Publication No.: US08671965B2Publication Date: 2014-03-18
- Inventor: Miguel A. Saldana , Greg Sexton
- Applicant: Miguel A. Saldana , Greg Sexton
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: F17D1/00
- IPC: F17D1/00

Abstract:
An apparatus to supply a plurality of process fluids for processing a substrate in a semiconductor processing chamber. The apparatus includes a plurality of process fluid supply valves and a fluid supply network that is defined between a crossover valve and a tuning supply valve. The apparatus further includes a tuning fluid supply being connected to the fluid supply network through the tuning supply valve. Further included with the apparatus is a plurality of process fluids that are connected to the fluid supply network through the plurality of process fluid supply valves. A process chamber that has a substrate support is also included in the apparatus. The process chamber further including an edge fluid supply and a center fluid supply, the edge fluid supply connected to the fluid supply network through an edge enable valve and the center supply connected to the fluid supply network through a center enable valve.
Public/Granted literature
- US20130056078A1 Methods for Enhanced Fluid Delivery on Bevel Etch Applications Public/Granted day:2013-03-07
Information query
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