Invention Grant
- Patent Title: Mass flow controller hysteresis compensation system and method
- Patent Title (中): 质量流量控制器滞后补偿系统及方法
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Application No.: US12356661Application Date: 2009-01-21
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Publication No.: US08671973B2Publication Date: 2014-03-18
- Inventor: Alexei V. Smirnov
- Applicant: Alexei V. Smirnov
- Applicant Address: JP Tokyo
- Assignee: Hitachi Metals, Ltd.
- Current Assignee: Hitachi Metals, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Neugeboren O'Dowd PC
- Main IPC: F16K31/36
- IPC: F16K31/36 ; G05B13/02 ; G05D7/00 ; G05D11/00

Abstract:
A method of characterizing hysteresis as a function of a device output comprising, applying an input signal across a first input signal range to a device, the input signal inducing a device function having a first output with a first output value range dependent upon the first input signal range. The input signal is further applied across a second input signal range to the device, the input signal inducing the device function to have a second output with a second output value range dependent upon (i) the second input signal range and (ii) device hysteresis. A difference between the second input signal range and the first input signal range is then measured across the first and second output value ranges. A method of operating a mass flow controller valve and a mass flow controller are also contemplated.
Public/Granted literature
- US20100180951A1 Mass Flow Controller Hysteresis Compensation System & Method Public/Granted day:2010-07-22
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