Invention Grant
- Patent Title: Vacuum valve
- Patent Title (中): 真空阀
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Application No.: US13119530Application Date: 2009-09-21
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Publication No.: US08672293B2Publication Date: 2014-03-18
- Inventor: Florian Ehrne , Thomas Blecha
- Applicant: Florian Ehrne , Thomas Blecha
- Applicant Address: CH Haag
- Assignee: VAT Holding AG
- Current Assignee: VAT Holding AG
- Current Assignee Address: CH Haag
- Agency: Volpe and Koenig, P.C.
- Priority: DE102008049353 20080929
- International Application: PCT/AT2009/000366 WO 20090921
- International Announcement: WO2010/034046 WO 20100401
- Main IPC: F16K25/00
- IPC: F16K25/00 ; F16K3/00

Abstract:
A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15′, 16, 16′) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5). A bearing unit (17, 17′) is provided, which is located outside of the vacuum region of the vacuum valve and rigidly connected to the wall (1) and by which a guide unit (20, 20′) that displaceably guides the valve rod (12) in the longitudinal direction (6) is guided displaceably in the transverse direction (7).
Public/Granted literature
- US20110175011A1 VACUUM VALVE Public/Granted day:2011-07-21
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