Invention Grant
- Patent Title: Piezoelectric element, piezoelectric actuator, droplet-ejecting head, droplet-ejecting apparatus, and method for manufacturing piezoelectric element
- Patent Title (中): 压电元件，压电致动器，液滴喷射头，液滴喷射装置以及压电元件的制造方法
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Application No.: US13048175Application Date: 2011-03-15
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Publication No.: US08672455B2Publication Date: 2014-03-18
- Inventor: Koji Ohashi , Masao Nakayama , Noboru Furuya
- Applicant: Koji Ohashi , Masao Nakayama , Noboru Furuya
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2010-059120 20100316
- Main IPC: B41J2/045
- IPC: B41J2/045
Abstract:
A piezoelectric element includes a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a resin layer that covers at least the side surfaces of the first electrode. The first electrode includes a metal layer and an anti-oxidation layer. The metal layer is formed of a base metal. The anti-oxidation layer is disposed between the metal layer and the piezoelectric layer to prevent contact between the metal layer and the piezoelectric layer.
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