Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
- Patent Title (中): 印刷装置及制品制造方法
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Application No.: US13367447Application Date: 2012-02-07
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Publication No.: US08672661B2Publication Date: 2014-03-18
- Inventor: Ken Minoda
- Applicant: Ken Minoda
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2011-023984 20110207
- Main IPC: B29C71/02
- IPC: B29C71/02 ; B29C71/04 ; B29C59/02

Abstract:
An imprint apparatus that includes a holding unit, and performs an imprint process, including molding of an imprint material on a substrate held by the holding unit using a mold, curing of the molded imprint material, and releasing of the cured imprint material from the mold, to form a pattern on the substrate. The apparatus includes a first cure device configured to perform a first cure process for the imprint material molded by the mold prior to the releasing; and a second cure device configured to perform a second cure process for the imprint material on the substrate conveyed out from the holding unit after the releasing.
Public/Granted literature
- US20120200006A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2012-08-09
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