Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
- Patent Title (中): 印刷装置及制品制造方法
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Application No.: US13367500Application Date: 2012-02-07
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Publication No.: US08672663B2Publication Date: 2014-03-18
- Inventor: Masayuki Tanabe , Yasuyuki Tamura , Yukio Hanyu
- Applicant: Masayuki Tanabe , Yasuyuki Tamura , Yukio Hanyu
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2011-023516 20110207
- Main IPC: B29B13/00
- IPC: B29B13/00

Abstract:
An imprint apparatus of the present invention that molds and cures an imprint material on a substrate using a mold to form a pattern on the substrate. The imprint apparatus includes a supply unit configured to supply a gas into a gap between the imprint material on the substrate and the mold. The supply unit is configured to supply a mixed gas in which a permeable gas, which permeates at least one of the mold, the imprint material and the substrate, and a condensable gas, which is liquefied under a pressure generated by the molding, is mixed with each other.
Public/Granted literature
- US20120199997A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2012-08-09
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