Invention Grant
US08675270B2 Scanning micromirror 有权
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Scanning micromirror
Abstract:
The present invention may relate to a scanning micromirror. The scanning micromirror can include a substrate having an open region; a micro plate provided in the open region; a first gimbal provided between the substrate and the mirror plate, and including a first curvature curved toward the mirror plate along an X-axis of the open region; a second gimbal including a second curvature formed along the first curvature of the first gimbal; a first elastic body configured to connect the substrate with the first curvature of the first gimbal; a second elastic body configured to connect the first gimbal with the second gimbal along a Y-axis of the open region; and a third elastic body configured to connect the second gimbal with the mirror plate along the Y-axis of the open region.
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