Invention Grant
- Patent Title: Scanning micromirror
- Patent Title (中): 扫描微镜
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Application No.: US13383375Application Date: 2010-08-26
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Publication No.: US08675270B2Publication Date: 2014-03-18
- Inventor: Dong June Choi , Byung Goo Lee , Tae Sik Kim , Tae Sun Lim
- Applicant: Dong June Choi , Byung Goo Lee , Tae Sik Kim , Tae Sun Lim
- Applicant Address: KR Seoul
- Assignee: LG Electronics Inc.
- Current Assignee: LG Electronics Inc.
- Current Assignee Address: KR Seoul
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: KR10-2009-0090102 20090923
- International Application: PCT/KR2010/005749 WO 20100826
- International Announcement: WO2011/037327 WO 20110331
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
The present invention may relate to a scanning micromirror. The scanning micromirror can include a substrate having an open region; a micro plate provided in the open region; a first gimbal provided between the substrate and the mirror plate, and including a first curvature curved toward the mirror plate along an X-axis of the open region; a second gimbal including a second curvature formed along the first curvature of the first gimbal; a first elastic body configured to connect the substrate with the first curvature of the first gimbal; a second elastic body configured to connect the first gimbal with the second gimbal along a Y-axis of the open region; and a third elastic body configured to connect the second gimbal with the mirror plate along the Y-axis of the open region.
Public/Granted literature
- US20120250124A1 SCANNING MICROMIRROR Public/Granted day:2012-10-04
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