A test apparatus including a first buffer section and a second buffer section that each buffers fail data and address data; an address fail memory section that writes the fail data buffered in the first buffer section to an address of an internal memory indicated by the address data corresponding to the fail data, using an RMW process; and a control section that, in a state in which the fail data and address data output from the testing section are supplied to the first buffer section, when unused capacity of the first buffer section becomes less than or equal to a predetermined first threshold value, supplies the fail data and address data output from the testing section to the second buffer section instead of to the first buffer section.