Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
- Patent Title (中): 印刷装置及制品制造方法
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Application No.: US13268351Application Date: 2011-10-07
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Publication No.: US08678808B2Publication Date: 2014-03-25
- Inventor: Setsuo Yoshida , Noriyasu Hasegawa , Yoshihiro Shiode , Tatsuya Hayashi
- Applicant: Setsuo Yoshida , Noriyasu Hasegawa , Yoshihiro Shiode , Tatsuya Hayashi
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-228830 20101008; JP2011-157719 20110719
- Main IPC: B29C59/02
- IPC: B29C59/02

Abstract:
The imprint apparatus of the present invention molds an imprint material on a substrate using a mold and cures the imprint material to form a pattern on the substrate. The apparatus includes a holder configured to attract the mold to hold the mold; and a pressure reduction device configured to reduce a back pressure of the mold held by the holder, wherein the apparatus is configured to reduce the back pressure by the pressure reduction device in parallel with release of the mold from the imprint material.
Public/Granted literature
- US20120086149A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2012-04-12
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