Invention Grant
US08678808B2 Imprint apparatus and article manufacturing method 有权
印刷装置及制品制造方法

Imprint apparatus and article manufacturing method
Abstract:
The imprint apparatus of the present invention molds an imprint material on a substrate using a mold and cures the imprint material to form a pattern on the substrate. The apparatus includes a holder configured to attract the mold to hold the mold; and a pressure reduction device configured to reduce a back pressure of the mold held by the holder, wherein the apparatus is configured to reduce the back pressure by the pressure reduction device in parallel with release of the mold from the imprint material.
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