Invention Grant
- Patent Title: Method of inspecting synthetic silicia glass molded body
- Patent Title (中): 检查合成石英玻璃成型体的方法
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Application No.: US13961499Application Date: 2013-08-07
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Publication No.: US08679994B2Publication Date: 2014-03-25
- Inventor: Masafumi Mizuguchi
- Applicant: Nikon Corporation
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2005-056108 20050301
- Main IPC: C03C3/06
- IPC: C03C3/06 ; G01N23/00

Abstract:
A method of inspecting a synthetic silica glass molded body includes: irradiating the synthetic silica glass molded body with a spectrum line of an Hg lamp having a wavelength of 248 nm; measuring light emitted by the synthetic silica glass molded body; and a procedure which may include screening a portion which satisfies a condition that a ratio of the bright line intensity and the fluorescent light intensity is of a certain value or less, or which may include determining whether a condition that a ratio of a minimum value and a maximum value of a measured fluorescent light intensity is in a certain range is satisfied or not.
Public/Granted literature
- US20130320219A1 METHOD OF INSPECTING SYNTHETIC SILICIA GLASS MOLDED BODY Public/Granted day:2013-12-05
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